Systematic and random errors in rotating-analyzer ellipsometry

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Systematic and random errors in rotating-analyzer, ellipsometry

Errors and error sources occurring in rotating-analyzer ellipsometry are discussed. From general considerations it is shown that a rotating-analyzer ellipsometer is inaccurate if applied at P = 00 and in cases when 0 = 0' or where A is near 00 or 1800. Window errors, component imperfections, azimuth errors and all other errors may, to first order, be treated independently and can subsequently b...

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ژورنال

عنوان ژورنال: Journal of the Optical Society of America A

سال: 1988

ISSN: 1084-7529,1520-8532

DOI: 10.1364/josaa.5.000773